Design of Miniature Mass Spectrometer Experiment Course
In this course, the miniature mass spectrometer is delivered as separate modular components, including a roughing pump, turbomolecular pump, vacuum chamber, RF system, vacuum interface components, and control board. Due to its compact size, multiple student groups can conduct experiments simultaneously in a standard teaching laboratory.
During the instrument assembly process, students can gain firsthand experience of the working principles of a mass spectrometer. A set of tuning targets is also established, such as signal conductivity, signal quality, power check, leak testing, and frequency tuning. Through this process, students enhance their problem-solving skills and teamwork abilities. Once the instrument assembly is complete, the final performance of the instrument is evaluated by testing it with standard reference materials.